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Development and investigation of MOEMS type displacement-pressure sensor for biological information monitoring

机译:用于生物信息监测的MOEMS型位移压力传感器的开发与研究

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The aim of this paper is to develop and investigate MOEMS displacement-pressure sensor for biological information monitoring. Developing computational periodical microstructure models using COMSOL Multiphysics modeling software for modal and shape analysis and implementation of these results for design MOEMS displacement-pressure sensor for biological information monitoring was performed. The micro manufacturing technology of periodical microstructure having good diffraction efficiency was proposed. Experimental setup for characterisation of optical properties of periodical microstructure used for design of displacement-pressure sensor was created. Pulsating human artery dynamic characteristics in this paper were analysed.
机译:本文的目的是开发和调查MoEMS位移压力传感器,用于生物信息监测。开发使用COMSOL Multiphysics建模软件开发计算期间微结构模型,用于模拟和形状分析,并进行这些结果的设计MoEMS为生物信息监测的位移压力传感器进行。提出了具有良好衍射效率的周期微观结构的微型制造技术。建立了用于置换压力传感器设计的期刊微结构的光学性质表征的实验装置。分析了本文的脉动人动脉动态特征。

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