Thin Films based on Tungsten Carbide with Binary, Ternary and Quaternary Composition, Obtained by Magnetron Sputtering

摘要

Tungsten carbide is an anorganic compound with very interesting tribology features such as: the highest melting point and hardness values among the known compounds, high elasticity (Young) modulus, high thermal stability on a large temperature range, low chemical reactivity, etc. Magnetron sputtering is the most convenient deposition method for obtaining tribological coatings with binary/ternary/quaternary composition starting from WC commercially magnetron sputtering targets. Roughness and grain size of such coatings were investigated by Atomic Force Microscopy and electrical sheet resistance was investigated by using the Four Point Probe Method with ALESSI head and W electrodes.