Structure design of an ultra-precision grinding machine tool and application in grinding small concave surfaces

摘要

To precisely grind the complex structural components with small concave surface with high profile accuracy and excellent surface quality, an ultra-precision grinding machine tool with special structure is needed.In this work, a kind of grinding machine was designed following the design principle that the machine tool was divided into several function modules and the structure of each module was designed and optimized.Then the static and dynamic characteristics of the machine tool were analyzed, and the weakest module was identified for the further analyzing and optimizing.Finally the machine tool was fabricated, and the component was ground on the developed machine.After grinding, the profile accuracy was 0.34μm and the surface roughness was 50.1nm.