This paper studies the method of simultaneous measurement of oxygen, hydrogen and water impurities that is based on combining moisture coulometric and solid electrolyte. The basic reduced measurement error for the molecular impurity in inert gases for measurements ranging from 0 to 5...50 and ...500 mln~(-1) of oxygen totals 6, 3.8 and 2.8 % respectively. Similarly, measurement error totals respectively 8, 3 and 3.8 % for hydrogen, and respectively 6, 3 and 3 % for water molecules.
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