Multimode parameter fuzzy self-tuning PID precise temperature control system

摘要

In this paper, lithography projection objective precision temperature control system is designed study. The system mainly consists of a PID controller, heating tanks, cooling module and circulation piping systems. To achieve ultra-precision temperature control, we studied the control algorithm and selected the multimode parameter fuzzy self-tuning PID control method finally. And we have built the experimental prototype to conduct the experiment that using other thermal load instead of the thermal load of the projection objective, the experimental results demonstrate that the system is stable and fast response, circulating water temperature can reach the set temperature in a short time and fluctuate within a range of ± 0.01 °C.