Consideration of Factors Towards Lowering the Natural Frequency of MEMS Based Cantilever Structure: Top Mass versus Back Etch Design

摘要

The ability to self-energize wireless sensor node promote the popularity of energy harvesting technique especially by using ambient vibration as the source of energy. In addition, the successful integration of the energy harvesting element on the same wafer as a wireless sensor node will promote the production in the MEMS scale and will reduce the overall cost of production. The usage of the cantilever structure as the transducer for converting mechanical energy (vibration) due to deflection of cantilever into the electrical energy is possible by depositing piezoelectric material on the cantilever. The usage of cantilever provide the simplest way for fabrication in the MEMS scale and also provide the ability to achieve low natural frequency. This paper present the work done on the simulation of the cantilever structure with the top end and back etch proof mass towards achieving low natural frequency in the MEMS scale by using IntelliSuite software.