A New Family of Roll to Roll Sputter Web Coaters Designed for TCO and Low Emissivity Coatings

摘要

We will present process results on TCO coatings in a newly designed web coating tool. The machine is capable of depositing up to five different materials in a layer stack from rotary cathodes. We will provide coating results obtained coating ITO for touch panel applications as well as other materials for the use in low emissivity coatings. Fully reactive sputtering of oxide materials using AC and bipolar pulsed Powersupplies will be compared. Industry leading process results such as high deposition rates can be obtained in the coating tool equipped with state of the art rotary cathodes, high pumping capacity, pretreatment unit and online metrology. Other benefits of the machine are the easy maintenance and short setup time: The substrate and drives are located on one trolley which can be opened to one side of the system, while the cathodes are located on a second trolley which can be opened to the other side. This allows simultaneous exchange of substrates and target materials in order to obtain maximum productivity.