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Design, fabrication, and test of a patterned optical filter array for the Europa Imaging System (EIS)

机译:用于欧洲成像系统(EIS)的图案化滤光器阵列的设计,制造和测试

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NASA's Europa Clipper will carry two cameras as part of the Europa Imaging System (EIS). Both the wide angle camera and narrow angle camera have identical focal plane modules, each containing a CMOS image sensor and patterned optical filter array. The filter array enables multispectral pushbroom imaging in six bands, spanning 380 nm to 1000 nm, adding additional science capability for surface characterization and searching for evidence of recent activity. The EIS filter array is monolithic in construction, with all bands coated on a single substrate. Each stripe measures only 320 μm wide-equivalent to 32 pixels on the image sensor-leaving most of the field of view clear for full frame panchromatic imaging. Using photolithography, a mask is applied to the filter substrate and developed, leaving only the desired pattern exposed. The filter is then deposited onto the substrate and the mask removed. This process is repeated for each additional band on the array until all filters have been applied. The filters are then aligned with the image sensor rows using a machined metal housing, placing it as close as possible to the focal plane. As part of a technology development program to qualify them for spaceflight, several filters have been performance tested for resistance to radiation exposure, thermal cycling, vibration, and dry heat microbial reduction for planetary protection.
机译:美国宇航局的Europa Clipper将携带两台摄像机作为Europa成像系统(EIS)的一部分。广角相机和窄角度相机都具有相同的焦平面模块,每个焦平面模块包含CMOS图像传感器和图案化的滤光器阵列。滤波器阵列使六个频段中的多光谱推通孔成像,跨越380nm至1000nm,为表面表征添加了额外的科学能力,并寻找最近活动的证据。 EIS滤波器阵列是整体的结构,所有带涂覆在单个基板上。在图像传感器上仅测量320μm宽相当于32像素 - 离开全帧平面成像的大部分视野清晰。使用光刻法,将掩模施加到过滤基板上并开发,仅留下所需的所需图案。然后将过滤器沉积在基板上并移除掩模。对于阵列上的每个附加频带重复该过程,直到所有滤波器都已应用。然后使用加工的金属壳体与图像传感器行对准,将其尽可能地靠近焦平面对齐。作为技术开发计划的一部分,以获得空间的空间,有几种过滤器已经测试了对辐射暴露,热循环,振动和干热微生物减少进行行星保护的性能。

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