Angular Distribution of XPS Peaks by Layers of a Finite Thickness

摘要

On the basis of the invariant imbedding method the equations describing energy spectra of X-ray photoelectron emission by layers of a finite thickness are presented. The analytical decisions describing angular distributions of electrons emitted by layer were received in small-angle approximation and neglect the backscattering factor. Approbation of the received decisions is executed on the basis of comparison with results of Monte-Carlo simulation. The limitations of the theory neglecting with processes of an electron elastic scattering are shown.