Possibility of growing alloy thin film by using prepared alloyed powder in electron gun deposition technique

摘要

In this article, we studied feasibility of growing Fe-Ni alloy thin films on both Si and glass substrates by using electron-gun deposition technique. Fe and Ni powders were mechanically alloyed with different percentages by ball mill technique. The final milled powder was used as a source material for depositing process. Powder materials were characterized structurally by using x-ray diffraction whereas grown thin films were analyzed by using x-ray reflectivity. The x- ray diffraction data of milled powder revealed a peak shift compared to the unmilled Ni and Fe peaks resulted in obtaining alloyed material. The distinct Kiessig fringes in the relative length scale are evidence of good layer quality in alloy thin films. The film grown on Si substrate exhibited more extended Kiessig fringes in reflectivity scans and the broadening of diffuse part in rocking curves scan became narrower as compared to the glass substrate; this indicated less interface roughness of the alloyed layer grown on silicon substrate. The chemical composition of the grown material was established through optical emission spectrometry. The results were much close to the percentage of prepared alloyed powder material.