In this paper, the design of compensator to stabilize the micromachined accelerometer is considered based on stability analysis, and the determination of relevant parameter is also proposed. In the design of compensator, in order to minimize the noise effect into the system of micromachined accelerometer, the technology of correlated double sampling (CDS) is considered. The compensator is implemented under 0.5 μm CMOS process and simulated in Cadence. The final simulation result shows that the compensator can afford phase of 15° to micromachined accelerometer at least to stabilize the system.
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