In this paper, we report the design and fabrication of a new temperature sensor by coupling a coplanar waveguide line with a resonator containing thermo-sensitive PDC-SiCN ceramics. A wide-band signal can be transmitted through the coplanar waveguide line and then passes the resonator with the maximum transfer of energy at the resonant frequency of the resonator, i.e. 10.6 GHz. The sensor can be operated in a wide temperature range from 50°C up to 300°C. We find that the resonant frequency of the sensor decreases from 10.331 GHz to 10.281 GHz when the dielectric constant of PDC-SiCN increases from 3.900 to 3.938 and the dielectric loss of PDC-SiCN increases from 0.0042 to 0.0067.
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