INSPECTION STRATEGIES AND INSPECTION PLANNING FOR DIMENSIONAL MEASUREMENTS OF MICRO- AND NANOSTRUCTURED COMPONENTS USING CASCADED SENSOR SYSTEMS

摘要

The large number of inspection features at dimensional measurements in the micro and nano range entails a need for a lossless information flow along the process chain. Thereby the process chain comprises CAD and CAQ and is characterised by neutral interfaces. The state-of-the-art is represented by the recently accomplished adaptation of the closed process chain [1] to the nano positioning and nano measuring machine (NPM) [2]. Thereby, novel principles of knowledge distribution and novel inspection strategies have been outlined. The paper on hand develops those ideas further. The originality lies with a novel system-theoretical model of a measurements process with an intelligent, adaptive sensor as part of the process chain. The model is discussed in detail. The necessity and the working principle of a cascaded sensor system is outlined. Thereby the application of each sub-sensor of the cascaded sensor system can be described by the system-theoretical model. The significance of the paper is due to the extension of the capabilities for automated inspection planning and inspection plan execution for micro- and nano-structured components. It contributes to the birth of industrial nanometrology [3].