Nano plasmon array for detection of light propagation in waveguide

摘要

Nowadays, applications of surface plasmon (SP) were highlighted for facilitating the all integrated optical circuit in nano space. We introduce the design and fabrication of a periodic array of gold nanostructure for detection of light which is propagated in a SiON waveguide. The gold nanostructures are designed using Finite Element Method (FEM) and fabricated by electron beam lithography and lift-off processes. The array is composed of 5 nano rods. The nanorod has 50 nm height, 100 nm width and 15 urn length. The enhancement of light at nano array was detected. Below the specific distance between nano array and waveguide, the nano array can detect the evanescent tail of light. The results demonstrate nanorods array can verify the fact that the incident light propagates in a waveguide or not when optical components are densely integrated.