Nitrogenated Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Deposited on Titanium Substrates by Pulsed Laser Deposition

摘要

Nitrogenated ultrananocrystalline diamond/nonhydrogenated amorphous carbon composite (UNCD/a-C) films were deposited on titanium in a nitrogen atmosphere by laser pulsed deposition. The adhesion between the films and titanium substrates were remarkably improved as compared with those between hydrogenated (UNCD/a-C) films and titanium substrates. X-ray photoemission and near edge X-ray absorption structure measurements indicated an increase in the sp~2 and sp bonding fraction such as C＝N and C≡N by nitrogenation. Since they locally disconnect tetrahedral bonding in the films and expected to release an internal stress in the films, the film adhesion might be improved.