Roll to Roll Sputtering Machine with All Rotary Cathodes And Easy Access to Cathode And Substrate Section - (PPT)

摘要

Roll to Roll sputtering system with up to 1680 mm coating width; Easy maintenance due to independent trolley for cathodes and substrate; Rotary cathodes for high process stability and target utilization; High pumping capacity for high productivity and good process stability; Layer stack for touch panel with good ITO Rs and uniformity; Coating materials for window film such as AZO, SnO_2 are available; Study of materials for window film applications and bipolar pulsed power ongoing; Experiments on TiO_2 and Ag are under preparation.