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Characterisation techniques to assess functional properties of barrier coatings for flexible PV substrates

机译:用于评估柔性PV基板的阻挡涂层功能性能的特征技术

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This paper details findings from recent work undertaken as part of the EU funded NanoMend project. The aim of the project is to develop integrated process inspection, cleaning, repair and control systems for nano-scale thin films on large area substrates. The presence of surface irregularities on the uncoated film can induce "defects" within the, aluminium oxide, barrier layer, these features are in the order of magnitude of nanometres to a few microns. These "defects" are examined and quantitatively characterised. The measurements are carried out using a Taylor Hobson Coherence Correlation Interferometer an optical microscope and SEM. The efficient separation of small features from large features is achieved using data segmentation and feature parameter techniques. The presence of both large and small features is then correlated with the water vapour transmission rate as measured on representative sets of films using at standard MOCON (quantitative gas permeation) test. The paper concludes that, based on analysis of water vapour transmission rates (WVTR) and defect size that small numbers of large features have a more significant effect on the deterioration of water vapour transmission rates. It is the WVTR which indicates the potential longevity of the device as it is the effectiveness of this ALD barrier layer to water vapour which ensures the effective function of the core CIGS layers encapsulated in the device. The ability to measure and effectively characterise the features which are significant defects in the ALD barrier layers provides novel information to enable automatic detection and correction of potential restrictors to device performance in the processes.
机译:本文作为欧盟资助的纳米民族项目的一部分进行了最近开展的工作的详细信息。该项目的目的是为大面积基板上的纳米尺寸薄膜开发综合流程检查,清洁,修理和控制系统。在未涂层膜上的表面不规则的存在可以在氧化铝,阻挡层内诱导“缺陷”,这些特征在纳米的幅度上为几微米。检查和定量表征这些“缺陷”。使用Taylor Hobson相容性相关干扰仪进行测量光学显微镜和SEM。使用数据分段和特征参数技术实现了来自大功能的小功能的有效分离。然后在使用标准MoCON(定量气体渗透)测试的代表性薄膜上测量的水蒸汽传动速率存在大小特征的存在。本文的结论是,基于对水蒸气传动速率(WVTR)的分析和缺陷尺寸,少量大特征对水蒸气传动速率的劣化产生更大的影响。这是WVTR,其表示该装置的潜在寿命,因为该ALD阻挡层与水蒸气的有效性,这确保了封装在装置中的芯CIGS层的有效功能。测量和有效地表征在ALD屏障层中具有重要缺陷的特征的能力提供了新颖的信息,以实现自动检测和校正电位限制器在过程中的设备性能。

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