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Analysis of Deformation of Reflector for RF-Excited CO_2 Laser

机译:RF激发CO_2激光反射器变形分析

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The paper aims to study the deformation and compensation of the reflector for RF-excited diffusion-cooled CO_2 laser. Based on ANSYS, the thermal deformation and compensation of the reflector have been calculated, it has been proved that the effect of temperature compensation is obvious, and can correct the thermal deformation of the reflector to the tolerance of the parameter of optical cavity.
机译:本文旨在研究RF激发扩散冷却CO_2激光器的反射器的变形和补偿。基于ANSYS,已经计算了反射器的热变形和补偿,已经证明了温度补偿的影响是显而易见的,并且可以校正反射器的热变形到光学腔参数的公差。

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