Laser interferometric sensor, esp. for measuring acceleration and inclination - has deformation body with flexible elements joined by coupling elements, one fixed and one free, the latter carrying tilt-invariant reflectors, employs full optical coupling

摘要

The laser interferometric sensor consists of a deformation body, an interferometer with a beam divider and two tilt-invariant reflectors, a light conductor illumination and sensing unit for monochromatic and broadband light and an evaluation unit. The deformation body consists of flexible elements (1) linked by two coupling elements (2.1,2.2), one (2.1) of which is rigidly attached to a base plate (3) carrying the beam divider (4), and the illumination (9) and sensing (10) units. The second, free coupling element (2.2) carries two tilt-invariant reflectors (8). The beam divider (4) comprises two abutting prisms (4.1,4.2) with rhomboid-shaped bases, forming an angle of 60 degrees at the apex. USE/ADVANTAGE - Sensor is insensitive to temp., torsion and shear.