Multi-angle Digital Holographic Profilometry for Precision Measurements

摘要

A novel digital holographic interferometry used for measuring the 3D shape is proposed. The theory analysis and simulation of multi-angle interferometry are described. General holographic interferometry are not able to measure the discontinuous object because of the phase unwrapping. However, in this method, holographic interferograms are generated by object beam and reference beam with different incident angles. Height information of every point at the object surface is extracted independently without the phase unwrapping. The results of simulation demonstrate that this method can be used for measuring the complicated and discontinuous object. It will be useful for the measuring the large and complex discontinuous surfaces often exist in mechanical machining.