Analyses of Adhesion Strength for DLC coating-silicon Structure

摘要

The adhesion strength of Diamond-like carbon (DLC) deposited onto silicon substrates using an arc-pulse sputtering technique was studied by experiments and numerical simulations. A scratch test was used to detect the adhesion strength of the DLC coating, which was simplified by two processes of tearing and peeling for FEA. The numerical simulations were performed by ABAQUS to calculate the two processes and integrate the result. The FEM simulation results fit with the scratch test. It is concluded that the simulation method is effusive and can be adopted to calculate the adhesion strength of DLC coating on the silicon substrate structure in other cases.