Laser processing for thin film crystalline silicon solar cells

摘要

Laser processing applied to thin film silicon is an interesting approach for solar cell fabrication, In this work, we investigate the effects of a continuous wavelength (CW) laser irradiation in solid phase or liquid phase of silicon on the structural and electrical properties of thin film silicon layers. Thus, results on CW laser induced crystallisation (LIC) of ultrathin amorphous silicon, laser induced epitaxy (LIE) of a thick amorphous silicon on a seed silicon layer, and laser induced thermal annealing (LIA) of poly crystalline silicon films are presented and discussed.