The goal of this paper is to provide a basis for MEMS marine-specific sensors and their associated harsh environmental packaging. Specifically, this paper will discuss our efforts in the development of two microfabricated systems to measure marine variables - (a) MEMS-based electrochemical systems to measure marine nutrients and (b) reinforced MEMS pressure sensor to measure spatial depths. The electrochemical detection-on-chip module was fabricated using assembled polypyrrole (PPy) nanowires as the sensing element. The measurement of nitrate ions in a flow through environment is presented here. For the depth measurements, we developed the double diaphragm or reinforced configuration to measure pressure/depth at both higher sensitivity (27% higher) and wider linear operating range (＞ 400 psi, from combination of inner and outer diaphragms) compared to the conventional single diaphragm design.
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