Batch-wise Calibration of Multi-Gas-Sensors and Calibration Models for Mono Gas and Multi Gas Applications

摘要

Although sensor chips for multi-gas-sensors are usually batch-wise fabricated, each sensor chip has to be individually calibrated to yield a high analytic performance. For multi gas applications, a sensor chip normally has to be measured for calibration at about 5 calibration points for every component, A new mathematical procedure for batch-wise calibration called ProCal was developed and extended to reduce the calibration effort nearly by a factor of five even for multi-gas-analysis. By application of the procedure to sensitivity data sampled at 5 mono gas applications and 4 multi component applications it is demonstrated that with this efficient calibration procedure the maximum analysis error for determination of the gas concentrations was estimated to less than 11 % for multi-gas-applications.