Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator

摘要

A varied-line-space grating is used in modern soft X-ray monochromators with a high resolving power. The gratingparameters require high accuracy because errors of the parameters lead to the degradation of the resolving power. Theparameter tolerances required to maintain a high resolving power were estimated by analytical calculation. The groovedensity variations of three gratings were measured with a long trace profiler. The measured errors in the parameterswere found to be sufficiently small.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.