Using single ZnO microwires, two strain sensors were fabricated. The sensor I made by a two-ends-bonded ZnO microwire was applied a tensile strain, demonstrating a strain-induced increase in the resistance. The coupled piezoresistance and piezoelectric effects were used to expain the phenomenon. The one-end-bonded ZnO microwire based sensor II was deflected at the free end, showing a linear relationship between the resistance and the bending degree, which is suggested to be associated with the piezoresistance effect. The work exhibits that the ZnO microwires are promising building blocks that can be integrated into the MEMS as a strain sensor for measuring tiny displacement.
展开▼
