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Stencil technology for wafer level bumping

机译:用于晶圆水平碰撞的模板技术

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Wafer level stencil printing of a Type-6 Pb-free SAC solder paste was statistically evaluated at 200μm and 150μm pitch using three different stencil manufacturing technologies: 1) laser-cut, 2) DC electroformed & 3) microengineered electroformed stencil. Factors evaluated in this study include differences between stencils in terms of printability, pitch resolution, maximum bump height achievable, print coplanarity, paste release efficiency and stencil frequency cleaning. Box plots were used to graphically view print performance over a range of aperture sizes for the three stencil types. Stencil technology impacts print performance, with the microengineered electroformed stencil producing the highest bump deposits and the lowest bump height deviation followed by the conventional electroformed and finally the laser cut stencil. consecutive between the I~(st) and 5~(th) print demonstrate consecutive printing without stencil cleaning is possible for all but the smallest spacings between apertures. High paste transfer efficiencies above 85% were achieved with the microengieered stencil using low aperture area ratios of 0.5.
机译:使用三种不同的模板制造技术(1)激光切割,2)DC电铸和3)微型内部电铸模板,在200μm和150μm的音高上统计评估6型PB的囊焊膏的模具印刷。本研究评估的因素包括模板之间的差异,在可印刷性,间距分辨率,最大凸块高度可实现,印刷共面,粘贴释放效率和模版频率清洁方面。盒子图用于以三种模板类型的一系列孔径尺寸进行图形视图观察打印性能。模板技术会影响打印性能,用微能电铸模板产生最高的凸块沉积物和最低凸块高度偏差,然后是传统的电铸,最后是激光切割模板。在I〜(ST)和5〜(Th)打印之间的连续进行演示在没有模板清洁的情况下表现出连续的印刷,这对于所有但孔之间的最小间距也是可能的。使用0.5的低孔径面积比,微型模版实现了高于85%的高浆料转移效率。

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