FDC coverage improvement infrastructure

摘要

Traditional method of selecting SVID, setting up FDC models and SPC alarm rules often depends on past experiences and abnormal cases. It's hard to achieve the overall FDC coverage across different tool types. In this paper, we adopt EQ subsystems concept into FDC model template and roll out these models throughout the fab by using combine charts. It can rapidly improve FDC coverage rate and hit rate for tool abnormity.