Fabrication of Insulating Micropatterns for Inner Electrode of Multilayer Ceramic Capacitor by Electrophoretic Deposition Based on SiO_2 Nanopowder

摘要

Micropatterns of silica were fabricated on interdigitated array (IDA) electrode used to be the insulting layer of inner electrode of multilayer ceramic capacitor (MLCC) by electrophoretic deposition. A three-electrode circuit system was applied to deposit the silica nanoparticle on the silver IDA electrode. The three-electrode system shows better deposition selectively of interval. Smaller IDA electrode spacing performed faster deposition rate and lower applied voltage. A crack-free film of silica was deposited at 10 V applied voltage for 20 s and sintered at 800°C. The resistance of micropattern film is 7 × 10~9 ohm. The adhesion between silica layer and electrode was improved after sintering.