Effect of catalysts on preparation of Sol-Gel Derived SiO_2 Antireflective Coating

摘要

Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO_2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic agent can effectively effect the structure of SiO_2 thin film.