Damping Nature of Vibrated Surface-Sensing Probe Controlled by Optical Radiation Pressure

摘要

We have developed a non-contact surface sensing probe for a nano-coordinate measuring system. This micro-probe is controlled by optical radiation pressure. The probe sphere is oscillated and then damped near the surface by a viscous drag force. The damping nature of the probe was studied to improve the precision of the surface detection. An attempt was made to characterize the probe damping nature by the viscous drag coefficient.