Sequential combination of micro-milling and laser structuring for manufacturing of complex micro-fluidic structures

摘要

This paper deals with the combination of micro milling and laser micro structuring for processing hot embossing dies for micro-fluidic applications. This strategy permits the advantages of each process technology to be exploited in order to achieve a cost and time efficient process and also to process forms and structures which cannot be manufactured with the single processes micro milling and laser micro structuring. Basic requirements are a high-precision positioning of the single process areas and also a good machining of the parts and structures with the manufacturing processes micro milling and laser micro structuring. The intersections between the different processing areas present a challenge for this process technology.