Laser Shock Microforming of Thin Metal Sheets with ns Lasers

摘要

Continuous and long-pulse lasers have been used for the forming of metal sheets in macroscopic mechanical applications. However, for the manufacturing of micro-electromechanical systems (MEMS), the use of ns laser pulses provides a suitable parameter matching over an important range of sheet components that, preserving the short interaction time scale required for the predominantly mechanical (shock) induction of deformation residual stresses, allows for the successful processing of components in a medium range of miniaturization without appreciable thermal deformation. In the present paper, the physics of laser shock microforming and the influence of the different experimental parameters on the net bending angle are presented.