Fabrication and Experimental Results of MEMS Polymeric Low Vacuum Pressure Sensor based on SU-8

摘要

In this paper, fabrication and measurement of low vacuum pressure sensor by used of SU8 based MEMS diaphragm is reported. The sensor was fabricated by photolithography technique. The thickness of diaphragm is 10 urn and it was coated by copper. The sensitivity of sensor to low vacuum pressure is -0.4282 nm/torr and has 0.02 torr resolution.