1 -D Photonic Wire Microcavities for Refractive Index Sensing

摘要

We present the design modelling and fabrication of Silicon-On-lnsulator (SOI) nanobeam cavities that are immersed in a microfluidic system for refractive index sensing. The sensitivity has a value greater than 200 nm/RIU with a Q-factor more than 20 000.