Study on Pneumatic Servo Valve with Piezoelectric Actuator

摘要

A kind of servo valve directly driven by piezoelectric multilayer actuator was proposed,Analyzing the working principle of the servo valve,the dynamic model of valve was built using an analytical approach.The simulation analysis was carried out by Matlab and AMEsim software respectively according to the system's dynamic mathematica model.Simulation results show that the valve has higher bandwidth and shorter response time than traditional electromagnetic servo vavle ,The step response time was 3.3ms,frequency was 313Hz,bandwidth reaches 438Hz ,and it is able to fast and accurately track input signal Besides,the servo valve has the advantages such as simpler mechanical structure,stronger anti-interference and better dynamic characteristic,which can make pneumatic components or control system realize low consumption,miniaturization,precision,high precision,high-speed,and a very good fit fieldbus.Thus application fields of the pneumatic valve are further widened.