Research and Design of Laser Accurate Displacement Measurement System

摘要

Laser displacement sensor(LDS) displacement measurement is a non-contact measurement with more precision and a wide range of applications. In this paper, a laser accurate displacement measurement system based on IDS and three-dimensional lincar-scrvomotor-driven actuators (3D LSDA) is presented. The 3D LSDA moving system is composed of linear servo motor, precision movable liner mechanism and servo machine. It is driven to move the noncontact laser displacement sensor to scan surfaces through the three-dimensional electric displacement platform, and then the measurement data is processed. The displacement sensor resolution is 2μm;each dimensional electric displacement platform repeated positioning accuracy is higher than 5μm.