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Submicron accuracy optimization for laser beam soldering processes

机译:激光束焊接工艺的亚微米精度优化

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Laser beam soldering is a packaging technology alternative to polymeric adhesive bonding in terms of stability and functionality. Nevertheless, when packaging especially micro optical and MOEMS systems this technology has to fulfil stringent requirements for accuracy in the micron and submicron range. Investigating the assembly of several laser optical systems it has been shown that micron accuracy and submicron reproducibility can be reached when using designof- experiment optimized solder processes that are based on applying liquid solder drops ("Solder Bumping") onto wettable metalized joining surfaces of optical components. The soldered assemblies were subject to thermal cycles and vibration/ shock test also.
机译:激光束焊接是一种包装技术,在稳定性和功能方面是聚合物粘合剂粘合的替代方案。尽管如此,当包装尤其是微光学和MoEms系统时,该技术必须满足严格要求,以便在微米和亚微米范围内的准确性。研究了几种激光光学系统的组装,已经显示使用基于施加液体焊料(“焊料撞击”)的设计 - 实验优化的焊料工艺,可以达到微米精度和亚微米再现性,该方法在光学的可湿性金属化接合表面上成分。焊接组件也受到热循环和振动/冲击试验。

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