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Interferograms processing for zone-plate interferometer

机译:区域板干涉仪的干涉处理

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The improved zone-plate interferometer (ZPI) is proposed to measure aspheric surface in this paper. A new computer generated hologram (CGH) zone-plate is designed and manufactured, which creates referring wavefronts for aspheric surface in the interferometer. The interferograms of ZPI are closed fringe patterns which are difficult to handle and the processing methods are researched. Two-dimensional fast Fourier transform (FFT) algorithm is proposed to extract phase. The principle and process of FFT method is described and the computer simulation proves its validity. The unwrapped phase distribution is got by the unweighted least-squares phase unwrapping algorithm. The error of aspheric surface is derived from the fitting method of Zernike polynomials. The methods are used to treat the aspheric surface measurement in experiment. The results show that the methods have achieved worthy measurement precision and have great development potential.
机译:提出了改进的区域板干涉仪(ZPI)以测量本文的非球面。设计和制造了一种新的计算机生成的全息图(CGH)区域板,其在干涉仪中创造了用于非球面的波前。 ZPI的干涉图是封闭的条纹图案,难以处理并且研究了处理方法。提出了二维快速傅里叶变换(FFT)算法以提取阶段。描述了FFT方法的原理和过程,计算机仿真证明了其有效性。未加权最小二乘相展开算法获得未包装的相分布。非球面误差源自Zernike多项式的配合方法。该方法用于治疗实验中的非球面测量。结果表明,该方法已达到有价值的测量精度,具有很大的发展潜力。

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