Measuring out of Flatness of a Rough Quartz Surface and Correction by Mist-Abrasion Machining

摘要

In this research, Air mist-abrasion machining method for corrective figuring of a rough isotropic quartz surface before polishing process has been proposed. By this method, not only the next polishing time decreases, but also figuring efficiency increases through the possibility of using bigger abrasive grain size. Since the restrictions of laser interferometer measuring devices, capacitor probe has been used for measuring "out of flatness" of a rough isotropic quartz surface and creating error map for corrective figuring. By the proposed Air mist-abrasion figuring method, flatness of a rough isotropic quartz surface improved from PV= 0.4μm to PV=0.1μm without any change in surface roughness value.