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REFRACTORY OVENS FOR ECR ION SOURCES AND THEIR SCALING

机译:ECR离子源的耐火烤箱及其缩放

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The radiofrequency (rf) oven can be used as a metal vapour injector for Electron Cyclotron Resonance ion sources; the application to high temperature boiling metals (like Cr, Ti and V) was recently demonstrated. Duration and reusability of oven parts were good, since only crucible needs to be maintained at a high temperature T_s. For vanadium case, achieved T_s was over 2300 K with about 280 W of rf power, with the present design and size, tailored to our 14.4 GHz ECRIS. Optimization for higher temperatures is also discussed. Materials, more than rf power coupling, emerge as ultimate limits. Comparisons with sputter probes and with different metals are briefly reported.
机译:射频(RF)烘箱可用作电子回旋共振离子源的金属蒸汽喷射器; 最近证明了高温沸点金属(如Cr,Ti和V)的应用。 烤箱部件的持续时间和可重用性良好,因为只需要在高温T_S处保持坩埚。 对于钒案,实现的T_S超过2300 k,RF功率约为280万,目前的设计和尺寸,适用于我们的14.4 GHz ECRIS。 还讨论了对较高温度的优化。 材料,超过RF电源耦合,出现为最终限制。 简要介绍了溅射探针和不同金属的比较。

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