A table-top size soft X-ray source based on inverse Compton scattering has been developed at Waseda University. We have already succeeded in generating X-rays via inverse Compton scattering between 4.6 MeV electron beam generated from a photocathode RF-gun and 1047 nm Nd:YLF laser. The energy of the X-ray is within the! Hwater window! region which can be applied to the soft X-ray microscope for biological observation. In 2007, new RF-gun cavity with Cs-Te photocathode in place of copper has been installed. The energy of electron beam has become up to 5.5 MeV due to the increase of Q-value of the gun cavity. With this achievement, generated X-ray energies will cover overall the! Hwater window! region. We have been planning a multi-pulse inverse Compton scattering X-ray generation system in order to enhance a luminous intensity of the X-rays. For this purpose, we are considering a multi-pulse UV laer system for generating a multi-bunch electron beam, the method for beam loading compensation, and the multi-pulse IR laser system for the Compton collisions.
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