Present status of upgraded long trace profiler for characterization ofhigh-precision X-ray mirrors at SPring-8

摘要

The long trace profiler (LTP) at SPring-8 has been fully upgraded in-house. The environmental temperature and air pressure supplied to the air bearing were stabilized. An intensity-stabilized He-Ne laser, air-bearing slider, optical elements, and a detector were replaced to improve the stability and resolution of slope measurement. The newly installed device, a motorized swivel stage, enables automatic stitching measurements. Two steep mirrors whose range of slope is wider than the angular range of the LTP were measured by using the stitching technique.