Equipment Demonstration Readiness: -Equipment Performance Metrics - Equipment Demonstration Methods - (PPT)

摘要

Equipment Performance Metrics (EPMs) provide customer targets for critical process and manufacturing performance metrics to suppliers as they begin development of 450 mm equipment. Tool demonstration will focus on 32 nm capability from early testing to first production worthy process and metrology equipment. Equipment maturation thereafter must achieve High Volume Manufacturing (HVM) cost/performance to support production ramps while technology scales to 22 nm and beyond. ITRS technology requirements were the starting point for EPM development, and refined with direct inputs from ISM I member company technical review. Supplier inputs were incorporated prior to EPM publications through a series of 3 workshops attended by >80 participants from -30 OEMs. EPMs have been defined for 60 tool types in the areas of equipment parameters, process targets, process characteristics, and manufacturing/performance targets/and are publically available at the ISMI website.