Smart sensors for all over industrial application niches AUTHORS

摘要

For many years, the University of Liege is involved in microelectronics and microsystem modeling, design and integration. Recently, the University of Liege has received the opportunity to build a brand new infrastructure (clean rooms - ISO 7) with specific equipments for packaging and MEMS characterization. This new facility (clean rooms and equipments) enables to the University to be very well positioned in the nano/microelectronics modeling, analysis and packaging world and is now able to answer to specific research and industrial needs. The two main research activities presented in this paper are, on the one hand, the design, analysis, tests of MEMS for simulation calibration, and on the other hand, the design, interconnection, encapsulation, in situ test and characterization of microsystems for industrial applications. Both laboratories are described hereafter.