Ultra-miniature implantable pressure sensor platform for medical Applications

摘要

Pressure sensors are a must for many new medical implantable devices, to monitor physiological pressure or fluid [1]. As for any implantable device, overall dimension is a key parameter (e.g. located in an artery), as well as very low power consumption (e.g systems on battery) or battery-less operation. Since these sensors are implanted for years without re-calibration, low drift and temperature stability are also required, as well as isolation from media such as blood, tissue, and saline solutions (biocompatible package). Up to now, the only available solutions were based on piezoresistive sensors which are power consuming with significant drift and temperature error. On the other hand, capacitive solutions are either based on LC tank (leading to poor resolution) or require nearby detection electronics, thereby leading to cumbersome solution. In this work, we present the salient features of a new pressure sensor platform that gets the benefits of both solutions, thereby answering to the harsh requirements of the medical industry.