CO_2 laser-cleaning of dimethylsilicone contamination on the surface of gold films

摘要

As a non-contact cleaning method, laser cleaning can effectively remove particulate contaminations of sizes as small as 0.1 μm without damage to the optics. In this work, 10.6 μm CO_2 laser was utilized to clean the dimethylsilicone oil contaminated on the surface of the gold-coated K9 glass. The dimethylsilicone oil contaminants with different degree were obtained by 10-30 minutes of vapor condensation. Single point irradiation mode was used to study the removal of the dimethylsilicone oil. The cleaning different degree of contaminations was investigated at the variable laser parameters, including laser power, laser frequency, and irradiation time. Optical microscope was used to analyze the cleaning effect. The results show that CO_2 laser can effectively remove the dimethylsilicone oil. On the premise that the gold-coated K9 glasses are not damaged, the cleaning area increases with the increase of radiation time and laser power. The cleaning area doesn't change much with the variation of laser frequency when the other parameters are the same. In addition, at the same laser parameters, the cleaning area increases as contamination degree increases.