Photo System based on Scanning Electron Microscope forIC Chip Inspection

摘要

To overcome shortcoming of traditional optical device, a photo system based on scanning electron microscope has beendeveloped. The photo system is composed of built-in compact piezoelectric stage and electron-beam controller. The stageis made up of piezoelectric driver and grating encoder system. It can operate in vacuum and non-magnetic environments.The electron-beam controller includes controlling model, deflection model, image acquisition model and position errorfeedback model. Scanning field can be calibrated before scanning. The photo system can scan the IC chip which is widerthan one scanning field quickly by using this nano-positioning stage. The position error can be compensated by theposition error feedback model, so the stitching precision between neighborhood images is improved. Legible IC imageis obtained by using this system.