Contactless Micro Position and Angular Sensor Device Based on Micro Structured Polymer Magnets

摘要

In this work, we present a contactless micro position and angular sensor system which consists of fixed commercial magnetic sensors, such as hall sensors and a movable part with integrated micro structured polymer magnets. This system serves particularly for linear and rotatory synchronous micro motors which we have developed and successfully tested. In order to achieve high precision and control of these motors an integration of the special micro position and angular sensors is pursued to increase the resolution and accuracy of the devices.