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A Study of the Structural, Mechanical and Tribological Properties of Ti-Al-N Coatings Post-Treated by Carbon Implantation

机译:碳植入后钛涂层涂层的结构,机械和摩擦学性能研究

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Carbon ion implantation has often been considered as an additional method to further improve the wear, corrosion and oxidation resistance of hard coatings on tools or machine parts. The present research investigates the effect of carbon implantation on the structural and mechanical properties of the sputter-deposited solid solution Ti-Al-N coatings. The carbon implantation was carried out by using metal vapour vacuum arc ion source (MEVVA) with solid cathode at energies of 5 and 50 keV, and a dose of 6×10~(17) atoms cm~(-2). The mechanical and the microstructure properties of the implanted layer were identified by a variety of analytic techniques, such as nano-indentation, X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) etc. Additionally, the wear performance of the samples was evaluated by a typical ball-on-disk tribometer in dry conditions. The results showed that the coatings with high energy carbon implantation exhibited an enhanced hardness. The improved hardness could be attributed to the formation of TiC phase, as indicated in XPS. In the sliding tests, the coatings with the post-treatment of carbon implantation showed an improved tribological property in terms of friction coefficient and wear rate. The friction coefficient could be reduced from 0.6 to 0.1. The coatings had ten-fold better wear resistance than the coating without ion implantation.
机译:碳离子注入通常被认为是进一步改善在工具或机器部件上硬涂层的磨损,腐蚀和抗氧化性的另外的方法。本研究研究了碳植入对溅射固溶液Ti-Al-N涂层的结构和力学性能的影响。通过在5至50keV的能量下使用具有固体阴极的金属蒸汽真空电弧离子源(MeVVA)进行碳植入,并且剂量为6×10〜(17)原子Cm〜(-2)。通过各种分析技术鉴定植入层的机械和微观结构特性,例如纳米凹陷,X射线光电子能谱(XPS)和X射线衍射(XRD)等。耐磨性样品通过在干燥条件下通过典型的球盘摩擦计评估。结果表明,具有高能量碳植入的涂层具有增强的硬度。改善的硬度可归因于形成TIC相的形成,如XPS中所示。在滑动试验中,在碳植入后处理的涂层在摩擦系数和磨损率方面表现出改善的摩擦学性质。摩擦系数可以从0.6降至0.1。涂层比没有离子注入的涂层具有10倍的耐磨性。

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